Method and apparatus for heat pipe cooling of an excimer lamp
US6747419B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2002 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Jul 3, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/046
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of the present invention are directed to a method and apparatus for heat pipe cooling of an excimer lamp. In one embodiment, a heat pipe is used to dissipate heat from an excimer lamp. The heat pipe is in direct contact with at least one electrode of the excimer lamp. In one embodiment, heat is transferred through the heat pipe to a cooling point that is electrically isolated from the lamp. In one embodiment, dissipation of heat from the cooling point is done by conventional means. In one embodiment, the heat pipe is on the inside of the lamp. In another embodiment, a heat pipe is attached to the outside of an excimer lamp. In another embodiment, two heat pipes are used, one on the inside and one on the outside of an excimer lamp. In yet another embodiment, a heat pipe is used with a flat lamp.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.