Apparatus and method of doping silica with fluorine during laydown
US6748768B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2001 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Nov 10, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/46
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method for doping silica soot with fluorine during laydown, including providing a bait rod, and providing a burner, wherein the burner emits a reactant flame. The method also including providing at least one first gas-feed separate from the burner, wherein the gas-feed supplies a first jet of fluorine-based gases, and depositing a layer of silica soot on the bait rod by vaporizing a silica producing gas within the reactant flame of the burner. The method further including supplying the first jet of fluorine-based gases to the silica soot deposited on to the bait rod via the first gas-feed subsequent to vaporizing at least a portion of the silica producing gas within the reactant flame of the burner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.