Patent · US Expired

Micromirror

US6749308B1 · kind B1 · utility

133Cited by

7References

20Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Andreas Niendorf · Berlin, DE
Karsten Funk · Stuttgart, DE

Key dates

Filing date	Mar 3, 2003
Grant date	Jun 15, 2004
Priority date	—
Expiry date	Mar 3, 2023

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S359/904
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A micromirror (5), a micro-oscillating mirror in particular, having an at least largely cantilevered mirror surface (10) which may be displaced from the rest position about at least one torsional axis (17) is described. The mirror surface (10) is linked to at least one support body (11, 12) by at least two torsion beams (13, 13′), which are arranged at least approximately parallel to each other. Also described is the displacement of the micrometer from its rest position by an electrostatic or magnetic interaction.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.