Patent · US Expired

Sensor accommodated in a housing

US6750522B1 · kind B1 · utility

8Cited by
6References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 14, 2002
Grant dateJun 15, 2004
Priority date
Expiry dateOct 25, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N33/0014
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A sensor is described for measuring the parameters of a fluid, in particular for detecting substances in a gas. It comprises a measuring section (4) on a semiconductor chip (1), which is protected by a housing (3). A partition wall (12) of the housing (3) divides the semiconductor chip (1) into two parts (1a, 1b). The first part (1a) is connected to the outside by means of openings in the housing and carries the measuring section. The second part (1b) is covered by a hardened sealing material (11). The sealing material (11) protects the semiconductor chip (1) from undesired environmental influences. The dividing wall (12) forms a capillary between the chip and the housing, the capillary action of which draws in the sealing material and the end of which stops the sealing material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.