Methods for affirming switched status of MEMS-based devices
US6750655B2 · kind B2 · utility
5Cited by
5References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2002 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Apr 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A configuration is provided by which it may be determined whether a MEMS device is in a select state. The select state is defined by a position of a moveable element, which is moved with electrostatic forces upon activation of an electrode. The select state is detected with a sensing configuration that has first and second regions. The regions are generally separated such that they are electrically uncoupled unless the moveable element is in the position that defines the select state. A detector may be provided to indicate whether the first and second regions are coupled electrically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.