Patent · US Expired

Radio frequency device using micro-electronic-mechanical system technology

US6750742B2 · kind B2 · utility

29Cited by
11References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 2002
Grant dateJun 15, 2004
Priority date
Expiry dateJan 1, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01P1/127
  • WIPO fieldTelecommunications
  • WIPO sectorElectrical engineering

Abstract

Provided is a radio frequency device using a micro-electronic-mechanical system (MEMS) technology that can be applied to a mobile communication area by reducing the operating voltage, while increasing the operating speed. The RF device of the present research includes: a substrate; a first electrode which is mounted on the substrate and forms an actuator, part of the first electrode not contacting the substrate; and a second electrode which is apart in a regular space from the substrate and forms an actuator, part of the second electrode being overlapped with the first electrode, wherein the first electrode and the second electrode contact each other at a contact point by an electrostatic attractive force generated between the two electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.