Driving device and exposure apparatus
US6750947B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2000 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Nov 1, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/026
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving device includes a first member, an annular second member arranged outside the first member, an annular first plate for connecting the first and second members to each other, and an annular second plate for connecting the first and second members to each other. The first and second members are moved relative to each other by supplying or exhausting a fluid into or from a space surrounded by the first and second members and the first and second plates. Also, at least one of (i) an inner diameter a1 of a portion of the second member at which the second member is connected to the first plate is different from an inner diameter a2 of a portion of the second member at which the second member is connected to the second plate and (ii) an outer diameter b1 of a portion of the first member at which the first member is connected to the first plate is different from an outer diameter b2 of a portion of the first member at which the first member is connected to the second plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.