Alkali-based treating liquid, treating liquid adjusting method and equipment, treating liquid supplying method and equipment
US6752545B2 · kind B2 · utility
5Cited by
4References
10Claims
0Family size
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Key dates
| Filing date | Aug 9, 2002 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Aug 9, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/322
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A treating liquid adjusting equipment for adjusting an alkali-based treating liquid for use in treating an organic film applied onto a substrate, which includes an adjusting portion. The adjusting portion for adjusting an alkalinity of the alkali-based treating liquid is such that a concentration of a first component contained in the alkali-based treating liquid and constituting an organic film of a same type as or different type from the organic film is in a range of 0.0001 to 2.0 mass %, and a concentration of an alkali component contained in the alkali-based treating liquid is in a range of 0.05 to 2.5 mass %.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.