Soaking apparatus
US6752624B2 · kind B2 · utility
0Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 27, 2002 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Nov 27, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC21D11/005
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
Soaking apparatus to treat materials which require higher accuracy in soaking and improved cleanliness. The soaking apparatus includes a heat treatment apparatus having walls, a ceiling and a floor, each divided into a plurality of sections, a heater block mounted on each section, a thermal sensor mounted to each heater block, and a thermal controller to control heating of the heater blocks based on a temperature measured by the thermal sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.