Gas separating and purifying method and its apparatus
US6752851B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2002 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Jun 19, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2259/404
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The gas separation and purification process can recover efficiently a valuable gas such as krypton and xenon to be used as an atmospheric gas in a semiconductor manufacturing equipment etc. by means of PSA process. In the process for separating a valuable gas in the form of purified product from a mixed gas, used as a raw gas, containing the valuable gas by means of pressure swing adsorption process, the valuable gas is separated and purified by using as the pressure swing adsorption process a combination of equilibrium pressure swing adsorption process for separating gas components based on the difference in equilibrium adsorption and rate-dependent pressure swing adsorption process for separating the gas components based on the difference in adsorption rates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.