Microfabrication methods and devices
US6752966B1 · kind B1 · utility
159Cited by
71References
61Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 1, 2000 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Jan 29, 2022 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0084
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Microfabrication methods and devices in which microscale structural elements are provided in an intermediate polymer layer between two planar substrates. Preferred aspects utilize photoimagable or ablatable polymer layers as the intermediate polymer layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.