Optical grating fabrication process
US6753118B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2002 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Dec 4, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/02138
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A grating fabrication process utilizes real-time measurement of a grating characteristic (such as, for example, grating period chirp, reflectivity, group delay) as a feedback error signal to modify the writing process and improve the characteristics of the finished grating. A test beam is launched through the optical medium during the writing process (or at the end of an initial writing process) and a particular characteristic is measured and used to generate a “corrective” apodization refractive index profile that can be incorporated with the grating to improve its characteristics. The improvements may be applied to a phase (or amplitude) mask used to write the grating (etching, local deformation, coating changes, for example), or the grating itself may be corrected using additional UV exposure, non-uniform annealing, non-uniform heating, and/or non-uniform tension—these techniques applied separately or in an intermittent sequence. The utilization of a “closed loop” grating fabrication process provides the ability to form gratings with finely tuned characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.