Low substrate loss inductor
US6753591B2 · kind B2 · utility
5Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 15, 2003 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Apr 15, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
Abstract
A low substrate loss inductor has a substrate, a plurality of p type doping areas and a plurality of n type doping areas formed alternatively inside the substrate, an insulating layer formed on the substrate, and a metal coil formed on the insulation layer. The insulation layer isolates the metal coil from the p type doping areas and n type doping areas. The doping areas are arranged orthogonal to the metal coil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.