Inspection apparatus and method adapted to a scanning technique employing a rolling wire probe
US6753684B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 29, 2002 |
| Grant date | Jun 22, 2004 |
| Priority date | — |
| Expiry date | Jul 1, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/067
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An inspection apparatus and method of electrode patterns using rolling wire probes, which includes a rolling wire rotating for performing a rolling contact sliplessly across the electrode patterns, and a control unit for controlling operations of the inspection apparatus wholly and for discriminating the electrical characteristics according to the electrical signal sensed through the rolling wire provided to the rolling wire probe. The inspection method is used flexibly with electrode patterns having various forms regardless of the change of model or design of the product, unlike the inspection method of the conventional art by the test pin block. Upon inspecting a pixel portion of the electrode pattern, a scratch is not generated by the rolling contact operation, thereby increasing yield of the finished goods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.