Patent · US Expired

MEMS reflectors having tail portions that extend inside a recess and head portions that extend outside the recess and methods of forming same

US6757093B2 · kind B2 · utility

5Cited by
23References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 20, 2002
Grant dateJun 29, 2004
Priority date—
Expiry dateJun 24, 2022

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2203/058
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A MEMs structure can include a recess in a substrate, the recess having a side wall and a floor. A tail portion of a moveable reflector is on the substrate and extends beyond the side wall of the recess opposite the recess floor and is configured to rotate into the recess. A head portion of the moveable reflector extends on the substrate outside the recess.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.