Method for manufacturing piezoelectric actuators and a piezoelectric actuator

US6757947B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Dieter Seipler · Reutlingen, DE
• Walter Rothlingshofer · Reutlingen, DE
• Susumu Nishigaki · Nagoya, JP

Key dates

• Filing date: May 2, 2002
• Grant date: Jul 6, 2004
• Expiry date: May 2, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49798

Abstract

A method for a parallel manufacturing of a plurality of piezoelectric actuators and a corresponding piezoelectric actuator utilize a plurality of thin foils composed of an unfired piezoelectric ceramic material which stacked one over another. On surface of foils, an electrode is provided for each actuator. For contacting electrodes, first and second connecting openings are provided. Electrodes have cut-outs which surround either first or second connecting openings. An electrically conductive paste is introduced into connecting openings. The stacked arrangement is fired and split up into the individual actuators. As internal electrodes, the electrodes are insulated from the surroundings.