Scanning MEMS mirror with reluctance force motor
US6758571B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 30, 2002 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Nov 15, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/1821
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A movable mirror device driven by a reluctance force motor is provided. A sheet of material has a mirror portion, a hinge portion, and a frame portion formed therein. The mirror portion is coupled to the frame portion via the hinge portion. The reluctance force motor is formed from a magnetic flux channeling circuit. A wire coiled about a portion of the magnetic circuit is used to induce a magnetic field through the magnetic circuit. Air gaps in the magnetic circuit provide attractive forces between portions of the magnetic circuit when a magnetic field is present in the magnetic circuit. The air gaps and the magnetic circuit are configured so that the magnetic attractive forces at the air gaps exert torque on the mirror portion about the hinge portion. When the hinge portion is twisted, it acts as a torsional spring biasing the mirror portion toward a neutral relaxed position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.