Patent · US Expired

Crystal support

US6758901B2 · kind B2 · utility

0Cited by
8References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 11, 2002
Grant dateJul 6, 2004
Priority date
Expiry dateMar 11, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T117/1072
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

The invention relates to a method and to a device for supporting a crystal ingot while pulling a single crystal, in particular such a crystal composed of silicon, according to the Czochralski method. To this end, a crystal support is provided which engages with a specialized bead, which is formed on the neck of the single crystal ingot and which has the shape of a bicone, by means of bearings in a housing. A support of the crystal ingot is thus achieved which may be disengaged at any time, and which has no disruptive effects on crystal growth and which acts independently of the length of the grown crystal. The bearings are moved into the support position on the bicone by a central pulling element which can be independently displaced relative to a second pulling element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.