Thin film-structure and a method for producing the same
US6759261B2 · kind B2 · utility
240Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 25, 2000 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Aug 2, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0167
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A thin film made of an amorphous material having supercooled liquid phase region is formed on a substrate. Then, the thin film is heated to a temperature within the supercooled liquid phase region and is deformed by its weight, mechanical external force, electrostatic external force or the like, thereby to form a thin film-structure. Thereafter, the thin film-structure is cooled down to room temperature, which results in the prevention of the thin film's deformation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.