Electronic device structures including interconnecting microfluidic channels
US6759713B2 · kind B2 · utility
15Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 22, 2002 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Nov 22, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K10/462
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.