Microwave stripline applicators
US6759808B2 · kind B2 · utility
5Cited by
8References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2002 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Oct 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/4622
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method which maintains plasma discharges (for instance 25) in containers (for instance 20) which have an internal section of 1 cm or less in width are described. The very small cross-section plasma discharges are useful in MEMS devices, in spectrometers and in spectroscopy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.