Aligner
US6760094B2 · kind B2 · utility
3Cited by
2References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 18, 2001 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Dec 18, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/42
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A print circuit board is demarcated with arbitrary areas. The print circuit board at one area is partly sucked and fixed on an alignment stage. After alignment with a mask, a pattern of the mask is transferred to the board. Next, shift is made to another area to repeat the same operation, thereby sequentially exposing all the areas to light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.