Actuator for dual-axis rotation micromirror
US6760145B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2003 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Jan 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/085
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An array of movable MEMS mirror devices is provided being electromagnetically actuated in one axis and using an additional set of coils, or a single coil, positioned off of the main axis of rotation to achieve a second axis of rotation while allowing for a very high linear mirror fill factor (>80%). This second set of coils, or second electrically wired coil, is capable of generating the necessary torque about an axis that is perpendicular to the major axis of rotation. A second embodiment is provided using electromagnetic actuation in one axis of rotation, which typically has larger rotation angles than the second axis, and electrostatic actuation in the second axis of rotation. Electrostatic pads can be used to sense rotation. When staggering adjacent pixels a center array of mirrors with no coils or electrodes provides increased radius of curvature and reducing undesirable cross-talk between adjacent mirror devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.