Method and apparatus for generating X-ray or EUV radiation

US6760406B2 · kind B2 · utility

Assignee

• JETTEC AB · SE

Inventors

• Hans Hertz · Stocksund, SE
• Oscar Ĥemberg · Stockholm, SE
• Lars Rymell · Stockholm, SE
• Bjorn Hansson · Bromma, SE
• Magnus Berglund · Bromölla, SE

Key dates

• Filing date: Oct 12, 2001
• Grant date: Jul 6, 2004
• Expiry date: May 9, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05G2/0023
• WIPO field: Medical technology
• WIPO sector: Instruments

Abstract

In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.