Three-dimensional tapered optical waveguides and methods of manufacture thereof
US6760529B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 11, 2001 |
| Grant date | Jul 6, 2004 |
| Priority date | — |
| Expiry date | Dec 11, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for fabricating a three-dimensional tapered optical waveguide and a three-dimensional tapered optical waveguide are shown and described. The fabrication method takes advantage of RIE lag to create a shaped trench in a lower cladding layer that has one end that is wider and deeper and than the opposite end. After the trench is filled with core material, a second RIE process is carried out which takes advantage of reverse RIE lag to etch the core material at a faster rate at the shallower and narrower end and at a slower rate at the wider and deeper end. The result is shaped core of a three-dimensional tapered optical waveguide that is wider and deeper at one end and tapers towards a shallower and narrower end for improved optical signal transmission.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.