Microfabricated linear accelerometer
US6761070B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2002 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | Apr 28, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A linear accelerometer is provided having a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and an inertial mass substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. The inertial mass is linearly movable relative to the fixed electrode. A central member is fixed to the substrate. Support arms support the inertial mass relative to the fixed electrode and allow linear movement of the inertial mass upon experiencing a linear acceleration along a sensing axis, and prevent linear movement along a nonsensing axis. Inputs and output lines are electrically coupled to the fixed electrode and the inertial mass. An output signal is generated which varies as a function of the capacitive coupling and is indicative of linear acceleration along the sensing axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.