Methods using filters employing both acidic polymers and physical-adsorption media

US6761753B2 · kind B2 · utility

Assignee

• Extraction Systems, Inc. · US

Inventors

• Oleg P. Kishkovich · Greenville, US
• Devon Kinkead · Cumberland, US
• Anatoly Grayfer · Newton, US
• William Goodwin · Medway, US
• David Ruede · Northbridge, US

Key dates

• Filing date: Jul 26, 2002
• Grant date: Jul 13, 2004
• Expiry date: Jul 26, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S95/901
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.