Grating structures and methods of making the grating structures
US6762880B2 · kind B2 · utility
19Cited by
26References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2001 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | Mar 12, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
New grating structures include a bonded transmission grating structure. The grating structure is encapsulated by two pieces that are bonded together. In addition, a new method of making grating structures includes forming wells with an aspect ratio (depth:width) of at least 3:1, 7:1 or greater. Such grating structures can be used to form gratings with high diffraction efficiencies for both TE and TM polarizations of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.