Method and device for measuring the flow of a fluid
US6763710B2 · kind B2 · utility
21Cited by
10References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2002 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Oct 17, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
To measure the flow in a liquid, the liquid (1) is led in a duct (2) along a flow sensor (3). The flow sensor (3) is integrated together with a processing and control circuit on a semiconductor substrate. It comprises a heating and, symmetrically thereto, two temperature sensors. The flow is determined from the temperature difference between the temperature sensors and/or from the power dissipation of the heating. For calibrating the sensor, a valve (4) is provided by means of which the duct (2) can be interrupted. This arrangement allows a flow measurement of high accuracy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.