Apparatus for purification of carbon dioxide
US6764535B1 · kind B1 · utility
10Cited by
35References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2001 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Apr 9, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S95/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Commonly available carbon dioxide may contain unacceptable amounts of compounds containing greater than about ten carbon atoms, sulfur-containing materials, and nitrogen-containing materials which are particularly detrimental to semiconductor and silicon wafer processing-related uses of carbon dioxide. These impurities can be effectively removed by an apparatus containing a combination of metal oxide, silica gel, and activated carbon, thus permitting an on-site, on-demand, convenient, and economic method of purifying carbon dioxide ranging from laboratory scale operations to tank car scale operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.