Apparatus for evaluating plasma polymerized polymer layer using UV spectrometer
US6764550B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2001 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Dec 6, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/33
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for evaluating a performance of a plasma-polymerized polymer layer using a UV spectrometer, including a polymerizing chamber for forming a polymerized polymer layer on a surface of a substrate by plasma discharging, a UV probe mounted contactless to the polymerized polymer layer formed in the polymerizing chamber and transmitting/receiving UV to and from the polymer layer and a UV spectrometer analyzing a signal inputted from the UV probe. With this apparatus, the characteristic of the surface of the substrate having a polymer layer consecutively polymerized by plasma can be evaluated in a contactless way, and the evaluation can be performed without affecting the process parameters such as the degree of vacuum within the chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.