Process for producing a tool insert for injection molding a part with single-stage microstructures
US6764924B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 24, 2003 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Nov 24, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29L2031/756
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Process for producing a tool insert for injection molding a part which is produced from a synthetic material, a metal or a ceramic material and which comprises an arrangement of microstructures which are formed on an outer surface of the part and have a predetermined depth. The process comprises the following steps:photo-lithographically masking the front side of a first wafer with a first etching mask which corresponds to an arrangement of microstructures,microstructuring the first wafer by means of plasma etching the front side of the first wafer to form an arrangement of microstructures, the depth of which extends over the entire thickness of the first wafer, so that the microstructures form cavities which have an orifice on the front side and on the rear side of the first wafer respectively,removing the first etching mask from the front side of the first wafer,bonding the front side of the first wafer to a carrier substrate to form a master,electrochemically depositing a metal layer on the rear side of the first wafer and in the cavities which are present therein and are formed by the microstructures, andseparating the metal layer from the master, wherein the separated metal la…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.