Method for producing a transition edge sensor
US6765207B2 · kind B2 · utility
1Cited by
2References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 30, 2002 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Sep 6, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K11/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.