Method of forming fiducial marks on a micro-sized article
US6765603B2 · kind B2 · utility
13Cited by
10References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2001 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Jan 13, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12102
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming fiducial marks on a micro-sized article has at least one optical feature adjacent the micro-sized article that focuses a collimated beam of light onto a surface opposite the mounting surface of the micro-sized article. Fiducial mark is formed on the surface that enables precise alignment of the micro-sized articles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.