Methods of testing and manufacturing micro-electrical mechanical mirrors
US6765680B2 · kind B2 · utility
23Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2002 |
| Grant date | Jul 20, 2004 |
| Priority date | — |
| Expiry date | Jan 4, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a method of testing micro-electrical mechanical mirrors including simultaneously applying a voltage to each of a plurality of such mirrors to tilt each of the plurality to a deflection angle, and simultaneously deflecting a beam from each of the plurality using an interferometer to simultaneously determine an accuracy of the deflection angle of each of the plurality. In addition, a method of manufacturing micro-electrical mechanical mirrors is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.