Patent · US Expired

Measuring optical phase

US6765681B1 · kind B1 · utility

8Cited by
4References
33Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 10, 2002
Grant dateJul 20, 2004
Priority date—
Expiry dateAug 29, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01M11/0271
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The phase (and amplitude) of a wave front may be accurately measured using knowledge of the wave front of an optical field generated by an optical element, permitting the determination of the spatial transfer function of that optical element. As a device under test is scanned across an aperture plate having slits, variations in the relative amplitude and phase of light passing through the slits are affected by the optical properties of the device under test, in turn affecting the interference pattern at a detector. Changes in the amplitude and phase of the detected signal are directly and uniquely related to the transfer function of the device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.