Precise measurement system for barrier materials
US6766682B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 2001 |
| Grant date | Jul 27, 2004 |
| Priority date | — |
| Expiry date | Nov 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/0826
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system is provided for measuring transmission characteristics of a gas of interest through a barrier material wherein a sealed test gas chamber is provided on one side of the barrier material and an aligned sealed measurement chamber is provided on the opposite side of the barrier material. A rough vacuum is pulled in the test gas chamber and a high vacuum pulled in the measurement chamber to establish a set pressure differential therebetween. A mass spectrometer having partial gas sensitivities of 5×10−4 Torr or lower in fluid communication with the measurement chamber determines permeation of the test gas of interest through the barrier material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.