Aqueous dispersion containing cerium oxide-coated silicon powder, process for the production thereof and use thereof

US6767377B2 · kind B2 · utility

Assignee

• Degussa AG · DE

Inventors

• Kai Schumacher · Hofheim, DE
• Helmut Mangold · Rodenbach, DE
• Juergen Meyer · Taunusstein, DE
• Wolfgang Lortz · Wächtersbach, DE
• Christoph Batz-Sohn · Hanau, DE

Key dates

• Filing date: Feb 5, 2003
• Grant date: Jul 27, 2004
• Expiry date: Feb 5, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/2993
• WIPO field: Basic materials chemistry
• WIPO sector: Chemistry

Abstract

The present invention relates to an aqueous dispersion containing a silicon dioxide powder coated with cerium oxide. In addition, the present invention provides a method of producing an aqueous dispersion containing a silicon dioxide powder coated with cerium oxide and methods of using this aqueous dispersion for chemical-mechanical polishing.