Susceptor with built-in plasma generation electrode and manufacturing method therefor
US6768079B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 29, 2002 |
| Grant date | Jul 27, 2004 |
| Priority date | — |
| Expiry date | Jan 14, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/2418
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides a susceptor with a built-in plasma generation electrode that can make the throughput by a range of plasma processing of a plate specimen uniform, and that has excellent plasma resistance, thermal conductivity and durability, and a manufacturing method that can obtain this susceptor with a built-in plasma generation electrode easily and economically.The susceptor with a built-in plasma generation electrode 11 of the present invention comprises: a mounting plate 12 formed from a ceramic, whose surface is a mounting surface 12a for mounting a plate specimen; a support plate 14 which supports this mounting plate 12 and in which a fixing hole 13 is formed; a plasma generation electrode 15 provided between the mounting plate 12 and the support plate 14; and a power supply terminal 16 provided in the fixing hole 13, wherein a region 21 in the vicinity of the connection of the plasma generation electrode 15 to the power supply terminal 16 has a lower resistance than the other region 22 of the plasma generation electrode 15.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.