Continuous-zoom imaging device of interferometer
US6768553B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 23, 2002 |
| Grant date | Jul 27, 2004 |
| Priority date | — |
| Expiry date | Jul 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2290/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides a continuous-zoom imaging device of an interferometer. Reflected lights of a reference plane and a test plane interfere with each other to generate an interference pattern. A collimation device converts a parallel light of the interference pattern into a convergent light. An optical path adjustment means guides the light to a polarizing beam splitter. A continuous-zoom device adjusts the magnification ratio of the interference pattern on the imaging passageway and to output an object image, which is then imaged on a charge-coupled device. The present invention can improve the quality of the interference pattern without using any rotating diffuser, and thus has the characteristics of reduced number of components, lowered cost, and shrunk volume. Besides, the present invention can utilize a joint device to connect the continuous-zoom device and an attenuator so as to achieve automatic light adjustment and convenient operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.