Co-deposited films with nano-columnar structures and formation process
US6770353B1 · kind B1 · utility
30Cited by
9References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2003 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Jan 13, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249953
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention concerns co-deposited films with nano-columnar structures. A film of the invention is formed upon a substrate, and includes a nano-columnar structure of a first material and a co-deposited second material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.