Patent · US Expired

Method for fabricating semiconductor layers

US6770542B2 · kind B2 · utility

25Cited by
4References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 20, 2002
Grant dateAug 3, 2004
Priority date
Expiry dateDec 22, 2022

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/2007
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A method is provided for fabricating a useful layer containing at least one semiconductor layer, in which the useful layer is separated from a carrier. In this case, the useful layer is applied to the carrier and an auxiliary carrier is applied to that side of the useful layer that is remote from the carrier by a connecting layer at a joining temperature. Afterward, the carrier is stripped away at a temperature that is greater than or equal to the joining temperature and is less than the melting point of the connecting layer. At least a part of the useful layer together with the auxiliary carrier is removed from the carrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.