Vinylphenylpropionic acid derivatives, production process therefor, polymer thereof and radiation sensitive resin composition
US6770780B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2002 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Aug 22, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/039
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Vinylphenylpropionic acid derivatives; processes for producing the derivatives; polymers of the same; and radiosensitive resin compositions containing the polymers. The above polymers exhibit low radiation absorption and are useful as the resin component of radiosensitive resin compositions particularly suitable for chemically amplified resists. For example, t-butyl 4-vinylphenylpropionate is produced by (1) reacting t-butyl bromoacetate with tri(n-butyl)phosphine to obtain a quaternary phosphonium salt, (2) reacting this salt with a base to obtain a phosphorus ylide, (3) reacting this ylide with 2,4,6-tris(3′,5′-di-t-butyl-4′-hydroxybenzyl)methyl-styrene to obtain a quaternary phosphonium salt, and (4) hydrolyzing this salt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.