Direct pattern writer

US6770866B2 · kind B2 · utility

Assignee

• Laser Imaging Systems GmbH & Co. KG · DE

Inventors

• Wolfgang Retschke · Jena, DE
• Wolfgang Senf · Jena, DE
• Yigal Katzir · Rishon LeZion, IL

Key dates

• Filing date: Jan 3, 2002
• Grant date: Aug 3, 2004
• Expiry date: Nov 15, 2022

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/123
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Apparatus for scanning a beam across a surface including a scanner scanning a pulsed laser beam across a surface and a position indicator receiving an input from the pulsed laser beam at a plurality of locations across the surface, and outputting position indications indicating a position of said pulsed laser beam along said surface. The position indications are used to modulate data in apparatus for exposing patterns on surfaces, for example electrical circuit patterns on photosensitized surfaces. One use of such apparatus is the manufacture of electrical circuits.