Bi-stable electrostatic comb drive with automatic braking
US6771001B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 16, 2001 |
| Grant date | Aug 3, 2004 |
| Priority date | — |
| Expiry date | Mar 16, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrostatic comb drive suitable for micro-electro-mechanical systems (“MEMS”) application uses shaped fingers to achieve bi-directional actuation from a unipolar actuation pulse. The finger shape also provides auto-braking of the movable member of the drive using a simple actuating pulse. In a further embodiment, an end stop inhibits overshoot and a back spring pushes the movable portion of the device back toward an operating position. In yet a further embodiment, a Vernier scale is provided on the movable portion of the drive relative to the fixed portion of the drive to indicate relative shift of these portions after the device is fabricated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.