Storage capacitor of planar display and process for fabricating same

US6773467B2 · kind B2 · utility

Assignee

• Toppoly Optoelectronics Corp. · TW

Inventor

• An Shih · Changhua City, TW

Key dates

• Filing date: Nov 12, 2002
• Grant date: Aug 10, 2004
• Expiry date: Mar 4, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D86/481

Abstract

A storage capacitor of a planar display is disclosed. The storage capacitor includes a substrate, a lower electrode, an insulator layer, and an upper electrode in space order. The lower electrode is made of a semiconductor material such as polysilicon. The upper electrode is made of metal or polysilicon. For the metallic upper electrode, the upper electrode is patterned to have a comb, fishbone or net shape in order to allow dopants penetrating therethrough to reach the lower electrode, thereby increasing the conductivity of the lower electrode. A process for fabricating such storage capacitor is also disclosed. For the case that both the upper and lower electrodes are made of polysilicon, two doping procedures of different doping intensities are performed to provide dopants for the upper and lower electrodes, respectively.