Electrostatic impact driving microactuator
US6774533B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 13, 2002 |
| Grant date | Aug 10, 2004 |
| Priority date | — |
| Expiry date | Nov 12, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An extremely small, self-moved, impact driven microactuator is disclosed that has a movable mass member electrostatically driven and which eliminates the need for it to be assembled individually. The microactuator includes a fixing member (1) securely connected to a pedestal part (14), an elastic support beam member (2) having one end securely connected to the fixing member, a movable mass member (3) fastened to the other end of the elastic support beam member, a driving electrode and a stopper member (4, 5) each securely connected to the pedestal part and spacedly juxtaposed with the movable mass member, and a power supply circuit (9) for applying a voltage between the movable mass and driving electrode members. In operation, turning the power supply circuit ON generates electrostatic attraction between the driving electrode member and movable mass members, thereby bringing the movable member into collision with the stopper member, followed by the transmission of a kinetic energy then produced to the outer frame part, and subsequently turning the power supply circuit OFF removes the electrostatic attraction, thereby permitting the movable mass member to return to its original posi…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.