Storage device slider with sacrificial lapping extension
US6776690B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2002 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Aug 19, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49037
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A process for fabricating sliders with one or more sacrificial structures (extensions) that facilitate lapping to create the air-bearing surface (ABS) is described. Prior to separating individual sliders from a wafer, a mask of material that is not removable by deep reactive ion etching (DRIE) is patterned on the surface of the sliders. The mask outlines a sacrificial extension around portions of the magnetic transducer elements that are nearest the predetermined plane which will become the ABS. The sacrificial extension makes the surface of the slider which will be lapped non-planar. The sacrificial extension extends below the predetermined ABS plane. When the sliders are individually separated by DRIE, the shape of the mask including the sacrificial extension is projected down into and along the slider body. In one embodiment, additional guide rails are disposed along the outer edges of the slider to facilitate maintaining slider symmetry during the lapping process. In another embodiment, the sacrificial extension is formed with a cross-sectional shape having a narrow neck to encourage breakage during the ABS lapping process, thus, further accelerating the process. In another emb…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.