Method and apparatus for thin film center shielding
US6776887B2 · kind B2 · utility
11Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Dec 9, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/50
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A carrier (20) is used in the thin film coating of disks (35). The disks (35) are held in a disk tray (30). The disks (35) have a center (35a) through which the thin film coating can go through. The carrier (20) includes a base plate (21) for receiving the disk tray (30). A plurality of discrete shields (24) are positioned in alignment with the center openings of the disk (35). The shields (24) are releasably connected to the base plate (21). Preferably, the shields (24) are releasably connected by a magnetic force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.