Method of manufacturing a fluid ejection device with a fluid channel therethrough
US6776915B2 · kind B2 · utility
4Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2002 |
| Grant date | Aug 17, 2004 |
| Priority date | — |
| Expiry date | Apr 4, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/1639
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A monolithic inkjet printhead is formed using single-side fabrication processes. Printing elements and feed channels are formed by processes working from a top of the die. During formation of the printing elements filler material is applied to the feed channel. Such material is later removed by an anisotropic etch. Such etchant works from the top surface and a side edge of the substrate. The single-side fabrication process is distinguished from fabrication processes that work from a bottom of a die to form the feed channel and fill channels and work from a top of the die to form printing elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.